Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9448468 | Reflective mask blank and reflective mask, and methods for manufacturing reflective mask blank and reflective mask | Masahito Tanabe, Norihito Fukugami, Yo Sakata, Takashi Haraguchi | 2016-09-20 |