Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9448468 | Reflective mask blank and reflective mask, and methods for manufacturing reflective mask blank and reflective mask | Masahito Tanabe, Norihito Fukugami, Tooru Komizo, Takashi Haraguchi | 2016-09-20 |
| 9442364 | Mask blank for reflection-type exposure, and mask for reflection-type exposure | Yutaka KODERA, Masato Kon | 2016-09-13 |
| 9285672 | Reflective mask and method for manufacturing same | Norihito Fukugami, Kazuaki Matsui, Genta Watanabe | 2016-03-15 |