Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9448468 | Reflective mask blank and reflective mask, and methods for manufacturing reflective mask blank and reflective mask | Masahito Tanabe, Yo Sakata, Tooru Komizo, Takashi Haraguchi | 2016-09-20 |
| 9285672 | Reflective mask and method for manufacturing same | Yo Sakata, Kazuaki Matsui, Genta Watanabe | 2016-03-15 |