Issued Patents 2016
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9519213 | Patterning process and resist composition | Tomohiro Kobayashi, Kentaro Kumaki, Chuanwen Lin, Masaki Ohashi, Masahiro Fukushima | 2016-12-13 |
| 9274425 | Resist composition and patterning process | Jun Hatakeyama, Seiichiro Tachibana | 2016-03-01 |
| 9250523 | Resist composition and patterning process | Jun Hatakeyama, Kenji Funatsu | 2016-02-02 |
| 9235122 | Monomer, polymer, resist composition, and patterning process | Masayoshi Sagehashi, Koji Hasegawa | 2016-01-12 |