Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9476120 | Temperature controlled showerhead | Henner Meinhold, Dan M. Doble, Stephen Yu-Hong Lau, Vince Wilson | 2016-10-25 |
| 9230800 | Plasma activated conformal film deposition | Adrien LaVoie, Shankar Swaminathan, Hu Kang, Ramesh Chandrasekharan, Tom Dorsh +9 more | 2016-01-05 |