Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9476120 | Temperature controlled showerhead | Henner Meinhold, Dan M. Doble, Vince Wilson, Easwar Srinivasan | 2016-10-25 |
| 9384959 | Purging of porogen from UV cure chamber | Eugene Smargiassi, George D. Kamian, Ming Xi | 2016-07-05 |
| 9268340 | Flow balancing in gas distribution networks | Jeffrey Womack | 2016-02-23 |