Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9401276 | Apparatus for forming porous silicon layers on at least two surfaces of a plurality of silicon templates | Mehrdad M. Moslehi, Karl-Josef Kramer, David Xuan-Qi Wang, Pawan Kapur, Somnath Nag +2 more | 2016-07-26 |
| 9384959 | Purging of porogen from UV cure chamber | Eugene Smargiassi, Stephen Yu-Hong Lau, Ming Xi | 2016-07-05 |