Issued Patents 2016
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9401276 | Apparatus for forming porous silicon layers on at least two surfaces of a plurality of silicon templates | Mehrdad M. Moslehi, Karl-Josef Kramer, Pawan Kapur, Somnath Nag, George D. Kamian +2 more | 2016-07-26 |
| 9397250 | Releasing apparatus for separating a semiconductor substrate from a semiconductor template | Mehrdad M. Moslehi, Sam Tone Tor, Karl-Josef Kramer | 2016-07-19 |
| 9343299 | Trench formation method for releasing a substrate from a semiconductor template | Mehrdad M. Moslehi | 2016-05-17 |
| 9330952 | Bipolar mobile electrostatic carriers for wafer processing | Mehrdad M. Moslehi | 2016-05-03 |
| 9295167 | Method to prewet wafer surface | Yue Ma | 2016-03-22 |