Issued Patents 2016
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9452481 | Reactive-species supply device and surface treatment apparatus | Hiroyuki Kano, Kazuaki Mori, Nobuyuki Nakane, Toshimitsu Watanabe, Joji Isozumi | 2016-09-27 |
| 9447518 | Radical generator and molecular beam epitaxy apparatus | Hiroshi Amano, Hiroyuki Kano, Shoji Den, Koji Yamakawa | 2016-09-20 |
| 9420697 | Method for manufacturing printed wiring board | Yoshiyuki Iwata, Hajime Sakamoto | 2016-08-16 |
| 9252000 | Microwave waveguide apparatus, plasma processing apparatus and plasma processing method | Hitoshi Itoh, Yusuke Kubota, Hirotaka Toyoda | 2016-02-02 |