Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9506142 | High density microwave plasma generation apparatus, and magnetron sputtering deposition system using the same | Kensuke Sasai | 2016-11-29 |
| 9252000 | Microwave waveguide apparatus, plasma processing apparatus and plasma processing method | Hitoshi Itoh, Yusuke Kubota, Masaru Hori | 2016-02-02 |