Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9506142 | High density microwave plasma generation apparatus, and magnetron sputtering deposition system using the same | Hirotaka Toyoda | 2016-11-29 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9506142 | High density microwave plasma generation apparatus, and magnetron sputtering deposition system using the same | Hirotaka Toyoda | 2016-11-29 |