Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9266146 | Film forming method and processing system | Kenji Matsumoto, Shigetoshi Hosaka | 2016-02-23 |
| 9252000 | Microwave waveguide apparatus, plasma processing apparatus and plasma processing method | Yusuke Kubota, Hirotaka Toyoda, Masaru Hori | 2016-02-02 |