Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9452481 | Reactive-species supply device and surface treatment apparatus | Masaru Hori, Hiroyuki Kano, Nobuyuki Nakane, Toshimitsu Watanabe, Joji Isozumi | 2016-09-27 |
| 9266696 | Conveyance control apparatus | Hideaki Ogawa, Yoshihiro Hanamoto, Yoshikazu Hara, Hiroaki Takanohashi, Yousuke Minowa +1 more | 2016-02-23 |