Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9452481 | Reactive-species supply device and surface treatment apparatus | Masaru Hori, Hiroyuki Kano, Kazuaki Mori, Nobuyuki Nakane, Toshimitsu Watanabe | 2016-09-27 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9452481 | Reactive-species supply device and surface treatment apparatus | Masaru Hori, Hiroyuki Kano, Kazuaki Mori, Nobuyuki Nakane, Toshimitsu Watanabe | 2016-09-27 |