Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9447518 | Radical generator and molecular beam epitaxy apparatus | Masaru Hori, Hiroshi Amano, Hiroyuki Kano, Koji Yamakawa | 2016-09-20 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9447518 | Radical generator and molecular beam epitaxy apparatus | Masaru Hori, Hiroshi Amano, Hiroyuki Kano, Koji Yamakawa | 2016-09-20 |