Issued Patents 2016
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9512985 | Systems for providing illumination in optical metrology | Gregory Brady, Andrei V. Shchegrov, Lawrence D. Rotter, Derrick Shaughnessy, Anatoly Shchemelinin +16 more | 2016-12-06 |
| 9429856 | Detectable overlay targets with strong definition of center locations | Barry Loevsky | 2016-08-30 |
| 9341769 | Spectral control system | Andrew V. Hill, Ohad Bachar, Avi Abramov, Daria Negri | 2016-05-17 |
| 9329033 | Method for estimating and correcting misregistration target inaccuracy | Eran Amit, Dana Klein, Guy M. Cohen, Amir Widmann, Nimrod Shuall +1 more | 2016-05-03 |
| 9255787 | Measurement of critical dimension and scanner aberration utilizing metrology targets | Barry Loevsky | 2016-02-09 |