Issued Patents 2016
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9499901 | High density TiN RF/DC PVD deposition with stress tuning | Yong Cao, Adolph Miller Allen, Tza-Jing Gung | 2016-11-22 |
| 9460959 | Methods for pre-cleaning conductive interconnect structures | Xiangjin Xie, Feng Q. Liu, Daping Yao, Alexander Jansen, Joung Joo Lee +2 more | 2016-10-04 |
| 9396933 | PVD buffer layers for LED fabrication | Mingwei Zhu, Rongjun Wang, Nag B. Patibandia, Vivek Agrawal, Cheng-Hsiung Tsai +5 more | 2016-07-19 |
| 9373485 | Apparatus and method for improved darkspace gap design in RF sputtering chamber | John C. Forster | 2016-06-21 |
| 9281167 | Variable radius dual magnetron | Thanh X. Nguyen, Rongjun Wang, Muhammad M. Rasheed | 2016-03-08 |