Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9499901 | High density TiN RF/DC PVD deposition with stress tuning | Yong Cao, Xianmin Tang, Adolph Miller Allen | 2016-11-22 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9499901 | High density TiN RF/DC PVD deposition with stress tuning | Yong Cao, Xianmin Tang, Adolph Miller Allen | 2016-11-22 |