Issued Patents 2016
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9496190 | Feedback of layer thickness timing and clearance timing for polishing control | Kun Xu, Feng Q. Liu, Dominic J. Benvegnu, Boguslaw A. Swedek, Yuchun Wang +1 more | 2016-11-15 |
| 9472475 | Feedback control using detection of clearance and adjustment for uniform topography | Kun Xu, Ingemar Carlsson, Tzu-Yu Liu, Shih-Haur Shen, Boguslaw A. Swedek +1 more | 2016-10-18 |
| 9296084 | Polishing control using weighting with default sequence | Jimin Zhang, Zhihong Wang, Harry Q. Lee | 2016-03-29 |
| 9281253 | Determination of gain for eddy current sensor | Kun Xu, Shih-Haur Shen, Boguslaw A. Swedek, Ingemar Carlsson, Doyle E. Bennett +2 more | 2016-03-08 |
| 9275917 | Determination of gain for eddy current sensor | Kun Xu, Shih-Haur Shen, Boguslaw A. Swedek, Ingemar Carlsson, Doyle E. Bennett +2 more | 2016-03-01 |
| 9248544 | Endpoint detection during polishing using integrated differential intensity | Jimin Zhang, Harry Q. Lee, Zhihong Wang | 2016-02-02 |