| 9425040 |
Method of forming laminated film and forming apparatus thereof |
Masaki Kurokawa, Hiroki IRIUDA |
2016-08-23 |
| 9419012 |
Three-dimensional memory structure employing air gap isolation |
Seiji Shimabukuro, Ryusuke Mikami |
2016-08-16 |
| 9378944 |
Method and apparatus of forming carbon film |
Satoshi MIZUNAGA, Takehiro Otsuka |
2016-06-28 |
| 9343292 |
Stacked semiconductor device, and method and apparatus of manufacturing the same |
Kazuhide Hasebe, Masaki Kurokawa |
2016-05-17 |
| 9293323 |
Method of forming silicon film |
Takahiro Miyahara, Tomoyuki Nagata |
2016-03-22 |
| 9263256 |
Method of forming seed layer, method of forming silicon film, and film forming apparatus |
Takahiro Miyahara, Tomoyuki Nagata |
2016-02-16 |