Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9293323 | Method of forming silicon film | Tomoyuki Obu, Takahiro Miyahara | 2016-03-22 |
| 9263256 | Method of forming seed layer, method of forming silicon film, and film forming apparatus | Tomoyuki Obu, Takahiro Miyahara | 2016-02-16 |