Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9390907 | Film forming method of SiCN film | Akira Shimizu, Masashi Shirai, Shinichiro Sadaike | 2016-07-12 |
| 9293323 | Method of forming silicon film | Tomoyuki Obu, Tomoyuki Nagata | 2016-03-22 |
| 9263256 | Method of forming seed layer, method of forming silicon film, and film forming apparatus | Tomoyuki Obu, Tomoyuki Nagata | 2016-02-16 |