Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9378944 | Method and apparatus of forming carbon film | Tomoyuki Obu, Takehiro Otsuka | 2016-06-28 |
| 9279183 | Film forming apparatus and method of operating the same | Atsushi Endo, Takehiro Otsuka | 2016-03-08 |