Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9343113 | Control apparatus and control method | Mitsuteru Sato | 2016-05-17 |
| 9279183 | Film forming apparatus and method of operating the same | Satoshi MIZUNAGA, Takehiro Otsuka | 2016-03-08 |