Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9513568 | Lithographic apparatus | Jan Steven Christiaan Westerlaken, Ruud Hendrikus Martinus Johannes Bloks, Peter A. Delmastro, Martinus Hendrikus Antonius Leenders, Mark Josef Schuster +4 more | 2016-12-06 |
| 9298107 | Lithographic apparatus and method | Gerardus Adrianus Antonius Maria Kusters, Bastiaan Andreas Wilhelmus Hubertus Knarren, Raymond Wilhelmus Louis Lafarre, Koen Steffens, Takeshi Kaneko +5 more | 2016-03-29 |
| 9280063 | Substrate table assembly, an immersion lithographic apparatus and a device manufacturing method | Johan Gertrudis Cornelis Kunnen, Sjoerd Nicolaas Lambertus Donders, Johannes Henricus Wilhelmus Jacobs, Martijn Houben, Frank Johannes Jacobus Van Boxtel +1 more | 2016-03-08 |