Issued Patents 2016
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9530627 | Method for cleaning titanium alloy deposition | Xinliang Lu, Kyoung-Ho BU, Jing Zhou, Seshadri Ganguli, David Thompson | 2016-12-27 |
| 9514933 | Film deposition using spatial atomic layer deposition or pulsed chemical vapor deposition | Yu Lei, Seshadri Ganguli, Bo Zheng, Rajkumar Jakkaraju, Martin Jeff Salinas +1 more | 2016-12-06 |
| 9330939 | Method of enabling seamless cobalt gap-fill | Bhushan Zope, Avgerinos V. Gelatos, Bo Zheng, Yu Lei, Xinyu Fu +2 more | 2016-05-03 |
| 9230815 | Methods for depositing fluorine/carbon-free conformal tungsten | Xinyu Fu, Avgerinos V. Gelatos, Atif Noori, Mei Chang, David Thompson +1 more | 2016-01-05 |
| 9230835 | Integrated platform for fabricating n-type metal oxide semiconductor (NMOS) devices | Avgerinos V. Gelatos, Seshadri Ganguli, Xinyu Fu, Bo Zheng, Yu Lei | 2016-01-05 |