Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9520295 | Metal doping of amorphous carbon and silicon films used as hardmasks in substrate processing systems | Fayaz Shaikh, Alice Hollister | 2016-12-13 |
| 9362133 | Method for forming a mask by etching conformal film on patterned ashable hardmask | Nader Shamma, Bart J. van Schravendijk, Chunhai Ji | 2016-06-07 |
| 9337068 | Oxygen-containing ceramic hard masks and associated wet-cleans | George Andrew Antonelli, Alice Hollister | 2016-05-10 |
| 9320387 | Sulfur doped carbon hard masks | Alice Hollister, Thorsten Lill | 2016-04-26 |