FS

Fayaz Shaikh

Lam Research: 1 patents #108 of 356Top 35%
Overall (2016): #404,183 of 481,213Top 85%
1
Patents 2016

Issued Patents 2016

Patent #TitleCo-InventorsDate
9520295 Metal doping of amorphous carbon and silicon films used as hardmasks in substrate processing systems Sirish Reddy, Alice Hollister 2016-12-13