Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9520295 | Metal doping of amorphous carbon and silicon films used as hardmasks in substrate processing systems | Sirish Reddy, Alice Hollister | 2016-12-13 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9520295 | Metal doping of amorphous carbon and silicon films used as hardmasks in substrate processing systems | Sirish Reddy, Alice Hollister | 2016-12-13 |