Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9530613 | Focusing a charged particle system | Steven R. Rogers, Rainer Knippelmeyer, Thomas Kemen, Stefan Schubert | 2016-12-27 |
| 9263233 | Charged particle multi-beam inspection system and method of operating the same | Dirk Zeidler, Rainer Knippelmeyer, Thomas Kemen, Mario Muetzel, Stefan Schubert +1 more | 2016-02-16 |