Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9530613 | Focusing a charged particle system | Rainer Knippelmeyer, Thomas Kemen, Stefan Schubert, Nissim Elmaliah | 2016-12-27 |
| 9414444 | Interface for controlling energy application apparatus | Avner Libman, Eyal Torres, Amichai Ron, Daniella Atzmony, Eliezer Gelbart | 2016-08-09 |
| 9332591 | RF heating at selected power supply protocols | Avner Libman, Caroline Myriam Rachel Obadia | 2016-05-03 |
| 9263233 | Charged particle multi-beam inspection system and method of operating the same | Dirk Zeidler, Rainer Knippelmeyer, Thomas Kemen, Mario Muetzel, Stefan Schubert +1 more | 2016-02-16 |