Issued Patents 2016
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9530613 | Focusing a charged particle system | Steven R. Rogers, Rainer Knippelmeyer, Stefan Schubert, Nissim Elmaliah | 2016-12-27 |
| 9384938 | Particle-optical systems and arrangements and particle-optical components for such systems and arrangements | Dirk Zeidler, Pascal Anger, Antonio Casares, Christof Riedesel | 2016-07-05 |
| 9349571 | Particle optical system | Pascal Anger, Dirk Zeidler, Gerd Benner | 2016-05-24 |
| 9324537 | Charged particle inspection method and charged particle system | Rainer Knippelmeyer, Stefan Schubert | 2016-04-26 |
| 9263233 | Charged particle multi-beam inspection system and method of operating the same | Dirk Zeidler, Rainer Knippelmeyer, Mario Muetzel, Stefan Schubert, Nissim Elmaliah +1 more | 2016-02-16 |