Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9263233 | Charged particle multi-beam inspection system and method of operating the same | Dirk Zeidler, Rainer Knippelmeyer, Thomas Kemen, Stefan Schubert, Nissim Elmaliah +1 more | 2016-02-16 |