Issued Patents 2016
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9384938 | Particle-optical systems and arrangements and particle-optical components for such systems and arrangements | Thomas Kemen, Pascal Anger, Antonio Casares, Christof Riedesel | 2016-07-05 |
| 9349571 | Particle optical system | Thomas Kemen, Pascal Anger, Gerd Benner | 2016-05-24 |
| 9336982 | Method of detecting electrons, an electron-detector and an inspection system | Jörg Jacobi | 2016-05-10 |
| 9263233 | Charged particle multi-beam inspection system and method of operating the same | Rainer Knippelmeyer, Thomas Kemen, Mario Muetzel, Stefan Schubert, Nissim Elmaliah +1 more | 2016-02-16 |