Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9530613 | Focusing a charged particle system | Steven R. Rogers, Thomas Kemen, Stefan Schubert, Nissim Elmaliah | 2016-12-27 |
| 9336981 | Charged particle detection system and multi-beamlet inspection system | — | 2016-05-10 |
| 9324537 | Charged particle inspection method and charged particle system | Thomas Kemen, Stefan Schubert | 2016-04-26 |
| 9263233 | Charged particle multi-beam inspection system and method of operating the same | Dirk Zeidler, Thomas Kemen, Mario Muetzel, Stefan Schubert, Nissim Elmaliah +1 more | 2016-02-16 |