Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9464352 | Low-oxidation plasma-assisted process | Ryu Nakano, Naoki Inoue | 2016-10-11 |
| 9368352 | Methods for forming doped silicon oxide thin films | Noboru Takamure, Atsuki Fukazawa, Hideaki Fukuda, Antti Niskanen, Suvi Haukka +1 more | 2016-06-14 |