Issued Patents 2016
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9464352 | Low-oxidation plasma-assisted process | Naoki Inoue, Kunitoshi Namba | 2016-10-11 |
| 9368352 | Methods for forming doped silicon oxide thin films | Noboru Takamure, Atsuki Fukazawa, Hideaki Fukuda, Antti Niskanen, Suvi Haukka +1 more | 2016-06-14 |
| 9343308 | Method for trimming carbon-containing film at reduced trimming rate | Yoshihiro Isii, Naoki Inoue | 2016-05-17 |
| 9284642 | Method for forming oxide film by plasma-assisted processing | Naoki Inoue | 2016-03-15 |