Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9455138 | Method for forming dielectric film in trenches by PEALD using H-containing gas | Atsuki Fukazawa, Noboru Takamure, Masaru Zaitsu | 2016-09-27 |
| 9368352 | Methods for forming doped silicon oxide thin films | Noboru Takamure, Atsuki Fukazawa, Antti Niskanen, Suvi Haukka, Ryu Nakano +1 more | 2016-06-14 |
| 9343297 | Method for forming multi-element thin film constituted by at least five elements by PEALD | Atsuki Fukazawa | 2016-05-17 |