Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9455138 | Method for forming dielectric film in trenches by PEALD using H-containing gas | Atsuki Fukazawa, Hideaki Fukuda, Masaru Zaitsu | 2016-09-27 |
| 9368352 | Methods for forming doped silicon oxide thin films | Atsuki Fukazawa, Hideaki Fukuda, Antti Niskanen, Suvi Haukka, Ryu Nakano +1 more | 2016-06-14 |