Issued Patents 2016
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9455138 | Method for forming dielectric film in trenches by PEALD using H-containing gas | Hideaki Fukuda, Noboru Takamure, Masaru Zaitsu | 2016-09-27 |
| 9396956 | Method of plasma-enhanced atomic layer etching | — | 2016-07-19 |
| 9368352 | Methods for forming doped silicon oxide thin films | Noboru Takamure, Hideaki Fukuda, Antti Niskanen, Suvi Haukka, Ryu Nakano +1 more | 2016-06-14 |
| 9343297 | Method for forming multi-element thin film constituted by at least five elements by PEALD | Hideaki Fukuda | 2016-05-17 |