Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9455138 | Method for forming dielectric film in trenches by PEALD using H-containing gas | Atsuki Fukazawa, Hideaki Fukuda, Noboru Takamure | 2016-09-27 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9455138 | Method for forming dielectric film in trenches by PEALD using H-containing gas | Atsuki Fukazawa, Hideaki Fukuda, Noboru Takamure | 2016-09-27 |