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Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Martinus Hendrikus Antonius Leenders +4 more |
2016-10-25 |
| 9454088 |
Immersion liquid, exposure apparatus, and exposure process |
Marco Koert Stavenga, Jacobus Johannus Leonardus Hendricus Verspay, Franciscus Johannes Joseph Janssen, Anthonie Kuijper |
2016-09-27 |
| 9405205 |
Lithographic apparatus and in-line cleaning apparatus |
Roelof Frederik De Graaf, Bauke Jansen, Hubertus Leonardus Franciscus Heusschen |
2016-08-02 |
| 9360765 |
Lithographic apparatus and device manufacturing method |
Christiaan Alexander Hoogendam, Antonius Theodorus Anna Maria Derksen, Sjoerd Nicolaas Lambertus Donders, Joeri Lof, Erik Roelof Loopstra +4 more |
2016-06-07 |
| 9289802 |
Lithographic apparatus and method of cleaning a surface of an immersion lithographic apparatus |
Anthonius Martinus Cornelis Petrus De Jong, Josephus Cornelius Johannes Antonius Vugts, Jacques Cor Johan Van Der Donck, Teunis Cornelis van den Dool, Gerrit Oosterhuis |
2016-03-22 |
| 9285686 |
Lithographic apparatus involving an immersion liquid supply system with an aperture |
Jeroen Johannes Sophia Maria Mertens, Christiaan Alexander Hoogendam, Patricius Aloysius Jacobus Tinnemans, Leon Joseph Maria Van Den Schoor, Sjoerd Nicolaas Lambertus Donders +1 more |
2016-03-15 |
| 9261797 |
Lithographic apparatus and device manufacturing method involving a liquid confinement structure |
Jacobus Johannus Leonardus Hendricus Verspay, Marco Koert Stavenga |
2016-02-16 |