Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9289802 | Lithographic apparatus and method of cleaning a surface of an immersion lithographic apparatus | Hans Jansen, Josephus Cornelius Johannes Antonius Vugts, Jacques Cor Johan Van Der Donck, Teunis Cornelis van den Dool, Gerrit Oosterhuis | 2016-03-22 |