Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9454088 | Immersion liquid, exposure apparatus, and exposure process | Hans Jansen, Jacobus Johannus Leonardus Hendricus Verspay, Franciscus Johannes Joseph Janssen, Anthonie Kuijper | 2016-09-27 |
| 9268242 | Lithographic apparatus and device manufacturing method involving a heater and a temperature sensor | Theodorus Petrus Maria Cadee, Johannes Henricus Wilhelmus Jacobs, Nicolaas Ten Kate, Erik Roelof Loopstra, Aschwin Lodewijk Hendricus Johannes Vermeer +20 more | 2016-02-23 |
| 9261797 | Lithographic apparatus and device manufacturing method involving a liquid confinement structure | Jacobus Johannus Leonardus Hendricus Verspay, Hans Jansen | 2016-02-16 |