Issued Patents 2016
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9358702 | Temperature management of aluminium nitride electrostatic chuck | Sumanth Banda, Jennifer Y. Sun, Shane C. Nevil | 2016-06-07 |
| 9338871 | Feedforward temperature control for plasma processing apparatus | Chetan Mahadeswaraswamy, Walter R. Merry, Sergio Fukuda Shoji, Chunlei Zhang, Yashaswini B. Pattar +7 more | 2016-05-10 |
| 9267742 | Apparatus for controlling the temperature uniformity of a substrate | Kallol Bera, Xiaoping Zhou, Andrew Nguyen, Hamid Tavassoli, Surajit Kumar +1 more | 2016-02-23 |
| 9248509 | Multi-zoned plasma processing electrostatic chuck with improved temperature uniformity | Hamid Tavassoli, Surajit Kumar, Kallol Bera, Xiaoping Zhou, Shane C. Nevil | 2016-02-02 |