| 9530888 |
MOCVD growth of highly mismatched III-V CMOS channel materials on silicon substrates |
Keun-Yong Ban, Zhiyuan Ye, Errol Antonio C. Sanchez, Xinyu BAO |
2016-12-27 |
| 9512520 |
Semiconductor substrate processing system |
Errol Antonio C. Sanchez, Satheesh Kuppurao |
2016-12-06 |
| 9476144 |
Method and apparatus for the selective deposition of epitaxial germanium stressor alloys |
Errol Antonio C. Sanchez |
2016-10-25 |
| 9443728 |
Accelerated relaxation of strain-relaxed epitaxial buffers by use of integrated or stand-alone thermal processing |
Swaminathan Srinivasan, Atif Noori |
2016-09-13 |
| 9406538 |
Indexed inline substrate processing tool |
— |
2016-08-02 |
| 9396909 |
Gas dispersion apparatus |
— |
2016-07-19 |
| 9347696 |
Compact ampoule thermal management system |
Errol Antonio C. Sanchez, Kenric Choi, Marcel E. Josephson, Dennis L. Demars |
2016-05-24 |
| 9322097 |
EPI base ring |
Steve Aboagye, Paul Brillhart, Surajit Kumar, Anzhong Chang, Satheesh Kuppurao +1 more |
2016-04-26 |
| 9279604 |
Compact ampoule thermal management system |
Errol Antonio C. Sanchez, Kenric Choi, Marcel E. Josephson, Dennis L. Demars, Emre Cuvalci +1 more |
2016-03-08 |
