Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9520266 | Pattern critical dimension measurement equipment and method for measuring pattern critical dimension | Kaori Shirahata, Yasunari Sohda, Makoto Sakakibara, Hajime Kawano, Hideyuki Kazumi | 2016-12-13 |
| 9336984 | Charged particle beam device and measuring method using the same | Hajime Kawano, Hideyuki Kazumi | 2016-05-10 |