Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9514953 | Methods for barrier layer removal | Sean S. Kang, Jeremiah T. Pender, Srinivas D. Nemani, He Ren, Mehul Naik | 2016-12-06 |
| 9299577 | Methods for etching a dielectric barrier layer in a dual damascene structure | He Ren, Sean S. Kang, Jeremiah T. Pender, Srinivas D. Nemani, Mehul Naik | 2016-03-29 |