Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9508547 | Composition-matched curtain gas mixtures for edge uniformity modulation in large-volume ALD reactors | Frank L. Pasquale, Edward Augustyniak, Yukinori Sakiyama, Shankar Swaminathan | 2016-11-29 |
| 9428833 | Method and apparatus for backside deposition reduction by control of wafer support to achieve edge seal | Andrew Duvall | 2016-08-30 |