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Andrew Duvall

Lam Research: 1 patents #108 of 356Top 35%
Overall (2016): #468,057 of 481,213Top 100%
1
Patents 2016

Issued Patents 2016

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
9428833 Method and apparatus for backside deposition reduction by control of wafer support to achieve edge seal Chloe Baldasseroni 2016-08-30