Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9377414 | EUV high throughput inspection system for defect detection on patterned EUV masks, mask blanks, and wafers | Yung-Ho Alex Chuang, Richard W. Solarz, David Shafer, David L. Brown | 2016-06-28 |
| 9310296 | Optimizing an optical parametric model for structural analysis using optical critical dimension (OCD) metrology | Thaddeus Gerard Dziura, Yung-Ho Alex Chuang, Xuefeng Liu, John J. Hench | 2016-04-12 |